Germany – Miscellaneous special-purpose machinery – XYZ Phi stage for wafers up to 12 inches (IMS-06.1) & 6-Axis Hexapods + Controllers (IMS-06.2) - PR1046956-2380-P

1 Piece - XYZ Phi stage for wafers up to 12 inches (IMS-06.1) 4 Piece - 6-Axis Hexapods + Controllers (IMS-06.2) Semi-automatic test setup for advanced R&D applications Option 1 (LV Pos. 2.5): Network Interface RS-232 and USB Option 2 (LV Pos. 5.3): Network Interface RS-232 and USB Option 3 (LV Pos. 12.3): Network Interface RS-232 and USB Option 4 (LV Pos. 14.1): Vibration isolation platform / table with possibility to simultanuously mount at least two 6D positioning stages and the rotation stage with xyz positioning control for 300 mm wafers.